Micro Wire Electrical Discharge Machining of MEMS Structures with Optimized Dimensional Deviation

Document Type: Original Article

Authors

1 Faculty of New Sciences and Technologies, University of Tehran, Tehran, Iran

2 Micro/Nano-Fabrication Technologies Development Laboratory, Faculty of New sciences & Technologies, University of Tehran, Tehran, Iran

3 Faculty of New Sciences and Technologies, University of Tehran, Tehran, Iran

Abstract

Metal-based microelectromechanical systems are widely used in applications such as micro-energy harvesters, micro-heat exchangers and micro-electromagnetic that require high strength and flexibility. In the fabrication of such systems, micro wire electrical discharge machining (MicroWEDM) is majorly used. This paper studies the effect of the MicroWEDM process parameters on the dimensional deviation of machined MEMS structures including microcantilevers and micro-beams using the Taguchi method. Using optimal levels of the parameters including pulse duration (0.8 µs), cutting speed (8.4 mm/min), voltage (17 V) and wire tension (0.5 kg), the dimensional deviation is reduced about 8.65 times compared with the average of experiments results. The order of effect importance of the process parameters on the dimensional deviation of microstructures obtained by the ANOVA analysis of S/N ratios is as follows: pulse duration, wire tension, process voltage and cutting speed. Dimensional deviation of the micro-features was reduced to 1 μm using the optimal levels of the process parameters.

Keywords

Main Subjects


[1]    Wu, W. J., Chen, C. T., Lin, S. C., Kuo, C. L., Wang, Y. J., and Yeh, S. P., Comparison of the Piezoelectric Energy Harvesters with Si-MEMS and Metal-MEMS, Journal of Physics: Conference Series Vol. 557, No. 1, 2014, pp. 012027.

[2]    Vasilyev, N. V., Gosline, A. H., Veeramani, A., Wu, M. T., Schmitz, G. P., Chen, R. T., Arabagi, V., Del Nido, P. J., and Dupont, P. E., Tissue Removal Inside the Beating Heart Using a Robotically Delivered Metal MEMS Tool, The International Journal of Robotics Research, Vol. 34, No. 2, 2015, pp. 236-247.

[3]    Uhlmann, E., Piltz, S., and Doll, U., Machining of Micro/Miniature Dies and Moulds by Electrical Discharge Machining—Recent Development, Journal of Materials Processing Technology, Vol. 167, No. 2, 2005, pp. 488-493.

[4]    Cao, D. M., Jiang, J., Meng, W. J., Jiang, J. C., and Wang, W., Fabrication of High-Aspect-Ratio Microscale Ta Mold Inserts with Micro Electrical Discharge Machining, Microsystem Technologies, Vol. 13, No. 5-6, 2007, pp. 503-510.

[5]    Wang, Y. K., Chen, X., Zhu, B., and Wang, Z. L., Micro-Channel Mold Machined by Ultrafine WEDM, Advanced Materials Research, Vol. 1049, 2014, pp. 1026-1029, Trans Tech Publications.

[6]    Ali, M. Y., Mustafizul Karim, A. N., Adesta, E. Y. T., Ismail, A. F., Abdullah, A. A., and Idris, M. N., Comparative Study of Conventional and Micro WEDM Based on Machining of Meso/Micro Sized Spur Gear, International Journal of Precision Engineering and Manufacturing, Vol. 11, No. 5, 2010, pp. 779-784.

[7]    Liao, Y. S., Chen, S. T., Lin, C. S., and Chuang, T. J., Fabrication of High Aspect Ratio Microstructure Arrays by Micro Reverse wire-EDM, Journal of Micromechanics and Microengineering, Vol. 15, No. 8, 2005, pp. 1547.

[8]    Song, M. C., Du, L. Q., Liu, C., Liu, J. S., and Liu, Y., Experimental Research on WEDM Machining for Metal Components with Micro/Meso-Scale, Key Engineering Materials, Vol. 609, 2014, pp. 1521-1525, Trans Tech Publications.

[9]    Chou, N., Byun, D., and Kim, S., MEMS-Based Microelectrode Technologies Capable of Penetrating Neural Tissues, Biomedical Engineering Letters, Vol. 4, No. 2, 2014, pp. 109-119.

[10] Kuriachen, B., Somashekhar, K. P., and Mathew, J., Multiresponse Optimization of Micro-Wire Electrical Discharge Machining Process, The International Journal of Advanced Manufacturing Technology, Vol. 76, No. 1-4, 2015, pp. 91-104.

[11] Somashekhar, K. P., Ramachandran, N., and Mathew, J., Modeling and Optimization of Process Parameters in Micro Wire EDM by Genetic Algorithm, Advanced Materials Research, Vol. 76, 2009, pp. 566-570.

[12] Somashekhar, K. P., Mathew, J., and Ramachandran, N., A Feasibility Approach by Simulated Annealing on Optimization of Micro-Wire Electric Discharge Machining Parameters, The International Journal of Advanced Manufacturing Technology, Vol. 61, No. 9, 2012, pp. 1209–1213.

[13] Rakwal, D., Heamawatanachai, S., Tathireddy, P., Solzbacher, F., and Bamberg, E., Fabrication of Compliant High Aspect Ratio Silicon Microelectrode Arrays Using Micro-Wire Electrical Discharge Machining, Microsystem Technologies, Vol. 15 No. 5, 2009, pp. 789–797.

[14] Schoth, A., forster, R., and Menz, W., Micro Wire EDM for High Aspect Ratio 3D Microstructuring of Ceramics and Metals, Microsystem Technologies, Vol. 11, No. 4, 2005, pp. 250-253.

[15] Di, S., Chu, X., Wei, D., Wang, Z., Chi, G., and Liu, Y., Analysis of Kerf Width in Micro-WEDM, International Journal of Machine Tools and Manufacture, Vol. 49, No. 10, 2009, pp. 788–792.

[16] Sivaprakasam, P., Hariharan, P., and Gowri, S., Modeling and Analysis of Micro-WEDM Process of Titanium Alloy (Tie6Ale4V) Using Response Surface Approach, Engineering Science and Technology, An International Journal, Vol. 17, No. 4, 2014, pp. 227-235.

[17] Allen, P., Chen, X., Process Simulation of Micro Electro-Discharge Machining on Molybdenum, Journal of Materials Processing Technology, Vol. 186, No. 1-3, 2007, pp. 346–355.

[18] Zhenlong, W., Xuesong, G., Guanxin C., and Yukui, W., Surface Integrity Associated with SiC/Al Particulate Composite by Micro-Wire Electrical Discharge Machining, Materials and Manufacturing Processes, Vol. 29, No. 5, 2014, pp. 532-539.

[19] Gupta, K., Jain, N. K., On Micro-Geometry of Miniature Gears Manufactured by Wire Electrical Discharge Machining, Materials and Manufacturing Processes, Vol. 28, No. 10, 2013, pp. 1153-1159.

[20] Ali, M. Y., Mohammad, A. S., Experimental Study of Conventional Wire Electrical Discharge Machining for Microfabrication, Materials and Manufacturing Processes, Vol. 23, No. 7, 2008, pp. 641-645.

[21] Hoang, K. T., Yang, S. H., Kerf Analysis and Control in Dry Micro-Wire Electrical Discharge Machining, The International Journal of Advanced Manufacturing Technologies, Vol. 78 No. 9, 2015, pp. 1803-1812.

[22] Santhanakumar, M., Adalarasan, R., and Rajmohan, M., Application of Desirability Analysis for Optimizing the Micro Wire Electrical Discharge Machining (µWEDM) Parameters, Applied Mechanics and Materials, Vol. 592, 2014, pp. 77-81.